Thin Film Physics Department – Auger Spectroscopy

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Thin Film Physics Department – Auger Spectroscopy

MFA, KFKI Campus, Building 26.
Contact: Attila Sulyok, sulyok @ mfa.kfki.hu
Research fields are based on AES analysis:
  • surface and interface segragation
  • AES depth profiling
  • Elastic Peak Electron Spectroscopy

Facilities:

Dedicated AES depth profiling device:
  • spectrometer: Staib DEAS 100, preretarded CMA
  • ion gun: modified TELETWIN
    • energy range 0.1-2 keV
    • angle of incidence 78-870 (with respect the surface normal)
    • projectile: noble gases
  • evaluation: TRIM based trial-and error method
  • depth resolution: in the range of 1 nm.
Measured depth profile: Restored in depth distribution
General purpose AES spectometry:
  • spectrometer: RIBER OPB 105 CMA
  • ion gun: as above
  • fracture stage