Thin Film Physics Department – Thin Film Deposition MFA, KFKI Campus, Building 25. Contact: György Zoltán Radnóczi, gy.radn @ mfa.kfki.hu Evaporators (HV, UHV), Magnetron Sputtering Systems (HV, UHV), residual gas analysis; TEM & HREM Auger Spectroscopy Thin Film Deposition TEM Sample Preparation Tribology Simulation & Modeling