Thin Film Physics Department – TEM & HREM Laboratory

Analytical and high resolution transmission electron microscopes and EDS analysis

MFA, KFKI Campus, Building 26.
Contact: Levente Illés, illes.levente @ ek-cer.hu

Philips CM20 TEM :	Analytical TEM with side entry goniometer, working at 200 kV (installed in 1990) 0.27 nm point to point resolution Versatile range of imaging and diffraction techniques available (SAED, microdiffraction, CBED) Nanoprobe X-ray microanalysis (EDS) with NORAN Voyager analyser (Z = 5 – 92) Special in situ investigations in heating/cooling holders On-line measurements of images and diffraction patterns User friendly computer control for easy change of modes of operation. Image intensified CCD-camera and monitor system for quick alignment
Specimen holders available for the Philips CM20 microscope : Single tilt holder (Philips), X-tilt range: ±45° Rotation holder (Philips), X-tilt: ±45°, rotation: 360° Double tilt analytical holder (GATAN), made of low background Be, with X- tilt of ±45° and Y-tilt of ±30° Double tilt, analytical, cooling holder (GATAN), same as above but can also be used with liquid nitrogen cooling to reduce specimen contamination Heating holder (Philips), with controlled temperature (up to 1000°C)
JEOL JEM-3010 HREM :	Atomic resolution TEM with side entry goniometer working at 300 kV (installed in 2001) 0.17 nm point-to-point resolution achieved by UHR pole piece, high stability electronics and vibration-free base Side entry goniometer allowing specimen-tilt up to 20 degree (X, Y) Single-tilt and double tilt sample holders (JEOL), as well as LN2 cooled double-tilt holder (GATAN) EELS analysis and energy filtered imaging with post-column imaging filter (GATAN GIF Tridiem, installed in October 2005) Options of image recording: photographic film, imaging plate or slow-scan CCD camera (part of the GIF system)